Samsung Electronics Reportedly Orders Over 70 Lithography Machines for PH1 Phase of Pyeongtaek P5 Fab

According to South Korean media reports, Samsung Electronics has ordered over 70 lithography machines for the first phase (PH1) of the P5 wafer fabrication complex at its Pyeongtaek semiconductor production base, in preparation for its launch in 2027. The total value of the order amounts to 10 trillion won (approximately $6.7 billion).

The report states that Samsung has ordered about 20 extreme ultraviolet (EUV) lithography systems from ASML for advanced processes below 10nm, as well as approximately 50 DUV lithography machines from ASML and Japan's Canon, bringing the total order size to around 70 units.

These machines are intended for production lines at the P5 plant within the Pyeongtaek base, to boost production capacity for the 6th-generation 1c DRAM process (10nm-class). As manufacturing efficiency for the 1c DRAM process improves, the yield of HBM4 produced using this process technology is also expected to increase.

The lithography systems ordered by Samsung are expected to be installed in cleanrooms once Phase 1 of the P5 project is completed in the first quarter of 2027. Given that the lead time from order to delivery for semiconductor equipment is typically around one year, Samsung is expected to begin moving lithography equipment—including EUV systems—into the P5 plant’s cleanrooms in the second quarter of 2027. Consequently, production capacity for Samsung’s 1c-process DRAM and HBM4 is anticipated to significantly increase in the second half of 2027.